CHARACTERIZATION OF THERMAL OXIDES GROWN ON TASI2/POLYSILICON FILMS

被引：13

作者：

PAWLIK, D

OPPOLZER, H

HILLMER, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 02期

关键词：

D O I：

10.1116/1.583305

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：492 / 499

页数：8

共 19 条

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