INFLUENCE OF SPUTTERING DAMAGE ON CHEMICAL INTERACTIONS AT CR-SIO2 INTERFACES

被引：3

作者：

CROS, A ^{[1
]}

SCHROTT, AG ^{[1
]}

THOMPSON, RD ^{[1
]}

TU, KN ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 22期

关键词：

D O I：

10.1063/1.97026

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1547 / 1549

页数：3

共 12 条

[1] INTERACTION BETWEEN CHROMIUM-OXIDE AND CHROMIUM SILICIDE [J].

CROS, A ;

POLLAK, RA ;

TU, KN .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) :258-259

[2] SIO2 ULTRA THIN-FILM GROWTH-KINETICS AS INVESTIGATED BY SURFACE TECHNIQUES [J].

DERRIEN, J ;

COMMANDRE, M .

SURFACE SCIENCE, 1982, 118 (1-2) :32-46

[3] INTERPRETATION OF XPS CORE LEVEL SHIFTS AND STRUCTURE OF THIN SILICON-OXIDE LAYERS [J].

FINSTER, J ;

SCHULZE, D ;

BECHSTEDT, F ;

MEISEL, A .

SURFACE SCIENCE, 1985, 152 (APR) :1063-1070

[4] STRUCTURAL MORPHOLOGY AND ELECTRONIC-PROPERTIES OF THE SI-CR INTERFACE [J].

FRANCIOSI, A ;

PETERMAN, DJ ;

WEAVER, JH ;

MORUZZI, VL .

PHYSICAL REVIEW B, 1982, 25 (08) :4981-4993

[5] PHOTOEMISSION STUDY OF CHROMIUM(111) SURFACE INTERACTING WITH OXYGEN [J].

GEWINNER, G ;

PERUCHETTI, JC ;

JAEGLE, A ;

KALT, A .

SURFACE SCIENCE, 1978, 78 (02) :439-458

[6] LOCAL ATOMIC AND ELECTRONIC-STRUCTURE OF OXIDE-GAAS AND SIO2-SI INTERFACES USING HIGH-RESOLUTION XPS [J].

GRUNTHANER, FJ ;

GRUNTHANER, PJ ;

VASQUEZ, RP ;

LEWIS, BF ;

MASERJIAN, J ;

MADHUKAR, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1443-1453

[7] AN XPS STUDY OF THE INFLUENCE OF ION SPUTTERING ON BONDING IN THERMALLY GROWN SILICON DIOXIDE [J].

HOFMANN, S ;

THOMAS, JH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (01) :43-47

[8] CHEMICAL AND ELECTRONIC-STRUCTURES OF THE SIO2-SI INTERFACE [J].

HOLLINGER, G .

APPLIED SURFACE SCIENCE, 1981, 8 (03) :318-336

[9] REACTION OF THIN METAL-FILMS WITH SIO2 SUBSTRATES [J].

PRETORIUS, R ;

HARRIS, JM ;

NICOLET, MA .

SOLID-STATE ELECTRONICS, 1978, 21 (04) :667-&

[10]

RAIDER SI, 1978, PHYSICS SIO2 ITS INT

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