共 10 条
[3]
ION-BEAM-INDUCED REACTIONS IN METAL-SEMICONDUCTOR AND METAL-METAL THIN-FILM STRUCTURES
[J].
NUCLEAR INSTRUMENTS & METHODS,
1981, 182 (APR)
:1-13
[6]
SMITH B, 1977, ION IMPLANTATION RAN
[8]
Tu K. N., 1978, THIN FILMS INTERDIFF
[9]
INTERFACE MODIFICATION OF REFRACTORY METAL-SILICON STRUCTURES BY ION-IMPLANTATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1979, 16 (06)
:1909-1912