OVERLAY ACCURACY EVALUATION IN STEP-AND-REPEAT X-RAY-LITHOGRAPHY

被引：2

作者：

DEGUCHI, K

KOMATSU, K

HORIUCHI, T

HIRATA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1988年 / 27卷 / 07期

关键词：

D O I：

10.1143/JJAP.27.1275

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1275 / 1280

页数：6

共 14 条

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