共 27 条
- [1] Adachi S., 1982, Journal of the Electrochemical Society, V129, P1524, DOI 10.1149/1.2124198
- [2] GAAS INTEGRATED OPTOELECTRONICS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (09) : 1372 - 1381
- [3] DRY PROCESS TECHNOLOGY (REACTIVE ION ETCHING) [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05): : 1023 - 1029
- [7] REACTIVE-ION ETCHING OF GAAS AND INP USING CCL2F2-AR-O2 [J]. APPLIED PHYSICS LETTERS, 1980, 37 (11) : 1022 - 1024
- [8] REACTIVE ION ETCHING OF GAAS IN A CHLORINE PLASMA [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (01): : 85 - 88