A STABLE TIN REACTIVE SPUTTERING DEPOSITION PROCESS

被引：3

作者：

CIRCELLI, N

QUEIROLO, G

机构：

来源：

APPLIED SURFACE SCIENCE | 1989年 / 38卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(89)90551-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：304 / 311

页数：8

共 12 条

[1] PREDICTING THIN-FILM STOICHIOMETRY IN REACTIVE SPUTTERING [J].

BERG, S ;

LARSSON, T ;

NENDER, C ;

BLOM, HO .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (03) :887-891

[2] MODELING OF REACTIVE SPUTTERING OF COMPOUND MATERIALS [J].

BERG, S ;

BLOM, HO ;

LARSSON, T ;

NENDER, C .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (02) :202-207

[3] EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THICK METAL AND CERAMIC DEPOSITS [J].

BLAND, RD ;

KOMINIAK, GJ ;

MATTOX, DM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04) :671-674

[4] THE DEPOSITION AND FILM PROPERTIES OF REACTIVELY SPUTTERED TITANIUM NITRIDE [J].

ELLWANGER, RC ;

TOWNER, JM .

THIN SOLID FILMS, 1988, 161 :289-304

[5] CHARACTERISTICS OF DC MAGNETRON, REACTIVELY SPUTTERED TINX FILMS FOR DIFFUSION-BARRIERS IN III-V SEMICONDUCTOR METALLIZATION [J].

NOEL, JP ;

HOUGHTON, DC ;

ESTE, G ;

SHEPHERD, FR ;

PLATTNER, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :284-287

[6]

POINTEVIN JM, 1982, THIN SOLID FILMS, V97, P67

[7] PRESSURE STABILITY IN REACTIVE MAGNETRON SPUTTERING [J].

SPENCER, AG ;

HOWSON, RP ;

LEWIN, RW .

THIN SOLID FILMS, 1988, 158 (01) :141-149

[8] KINETICS OF NITRIDE FORMATION ON TITANIUM TARGETS DURING REACTIVE SPUTTERING [J].

SUNDGREN, JE ;

JOHANSSON, BO ;

KARLSSON, SE .

SURFACE SCIENCE, 1983, 128 (2-3) :265-280

[9] MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .3. INFLUENCE OF SUBSTRATE BIAS ON COMPOSITION AND STRUCTURE [J].

SUNDGREN, JE ;

JOHANSSON, BO ;

HENTZELL, HTG ;

KARLSSON, SE .

THIN SOLID FILMS, 1983, 105 (04) :385-393

[10] MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .1. INFLUENCE OF PROCESS PARAMETERS ON FILM COMPOSITION [J].

SUNDGREN, JE ;

JOHANSSON, BO ;

KARLSSON, SE .

THIN SOLID FILMS, 1983, 105 (04) :353-366

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