SURFACE SMOOTHNESS AND CRYSTALLINE-STRUCTURE OF ICB DEPOSITED TIO2 FILMS

被引:13
作者
FUKUSHIMA, K [1 ]
YAMADA, I [1 ]
机构
[1] KYOTO UNIV,ION BEAM ENGN EXPTL LAB,KYOTO 606,JAPAN
关键词
D O I
10.1016/0169-4332(89)90186-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:32 / 36
页数:5
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