POST-IRRADIATION EFFECTS IN FIELD-OXIDE ISOLATION STRUCTURES

被引：79

作者：

OLDHAM, TR

LELIS, AJ

BOESCH, HE

BENEDETTO, JM

MCLEAN, FB

MCGARRITY, JM

机构：

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1987年 / 34卷 / 06期

关键词：

D O I：

10.1109/TNS.1987.4337450

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1184 / 1189

页数：6

共 17 条

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