THERMALLY STABLE OHMIC CONTACTS TO N-TYPE GAAS .5. METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS WITH NILNW OHMIC CONTACTS

被引:16
作者
MURAKAMI, M [1 ]
PRICE, WH [1 ]
GREINER, JH [1 ]
FEDER, JD [1 ]
PARKS, CC [1 ]
机构
[1] IBM CORP,E FISHKILL HIGH PERFORMANCE ASSURANCE,HOPEWELL JUNCTION,NY 12533
关键词
D O I
10.1063/1.342629
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:3546 / 3551
页数:6
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