SILICIDE FORMATION WITH NICKEL AND PLATINUM DOUBLE-LAYERS ON SILICON

被引：46

作者：

FINSTAD, TG ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

THIN SOLID FILMS | 1978年 / 51卷 / 03期

关键词：

D O I：

10.1016/0040-6090(78)90305-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：411 / 424

页数：14

共 25 条

[11] EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION
LAU, SS
CHU, WK
MAYER, JW
TU, KN
[J]. THIN SOLID FILMS, 1974, 23 (02) : 205 - 213
[12] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION
MAYER, JW
TU, KN
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 86 - 93
[13] SOLID-SOLID REACTIONS IN PT-SI SYSTEMS
MUTA, H
SHINODA, D
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) : 2913 - +
[14] FORMATION KINETICS OF CRSI2 FILMS ON SI SUBSTRATES WITH AND WITHOUT INTERPOSED PD2SI LAYER
OLOWOLAFE, JO
NICOLET, MA
MAYER, JW
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5182 - 5186
[15] INFLUENCE OF NATURE OF SI SUBSTRATE ON NICKEL SILICIDE FORMED FROM THIN NI FILMS
OLOWOLAFE, JO
NICOLET, MA
MAYER, JW
[J]. THIN SOLID FILMS, 1976, 38 (02) : 143 - 150
[16] CHROMIUM THIN-FILM AS A BARRIER TO INTERACTION OF PD2SI WITH AL
OLOWOLAFE, JO
NICOLET, MA
MAYER, JW
[J]. SOLID-STATE ELECTRONICS, 1977, 20 (05) : 413 - 415
[17] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON
POATE, JM
TISONE, TC
[J]. APPLIED PHYSICS LETTERS, 1974, 24 (08) : 391 - 393
[18] RADIOACTIVE SILICON AS A MARKER IN THIN-FILM SILICIDE FORMATION
PRETORIUS, R
RAMILLER, CL
LAU, SS
NICOLET, MA
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (10) : 501 - 503
[19] MARKER STUDIES OF SILICIDE FORMATION, SILICON SELF-DIFFUSION AND SILICON EPITAXY USING RADIOACTIVE SILICON AND RUTHERFORD BACKSCATTERING
PRETORIUS, R
RAMILLER, CL
NICOLET, MA
[J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 629 - 633
[20] RADIOACTIVE SILICON TRACER STUDIES OF FORMATION OF CRSI2 ON PD2SI AND PTSI
PRETORIUS, R
OLOWOLAFE, JO
MAYER, JW
[J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1978, 37 (03): : 327 - 336

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