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PREPARATION, CHARACTERIZATION AND APPLICATIONS OF SILICON-NITRIDE THIN-FILMS

被引：164
作者：
MOROSANU, CE
机构：
来源：
THIN SOLID FILMS | 1980年 / 65卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90254-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：171 / 208
页数：38
相关论文
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